Design and simulation of a novel operation mode of integrated ferroelectric micro-sensors

Chao Wang, Zheyao Wang, Tianling Ren, Litian Liu

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Scopus citations


This paper presents the design, modeling, and simulation of Lead Zirconate Titanate (PZT) based micro-sensors. The PZT thin film is polarized in-plane in stead of through-thickness, and thus utilizes d 33 working mode other than d 31 working mode. Micro-sensors using cantilever structures and InterDigital Electrodes (IDE) are numerically analyzed by Finite Element Analysis (FEA) method. The relation between the sensitivity and the IDE configurations is presented, and some results and conclusions can be used as future design guidelines. The simulation results show that the voltage sensitivity of micro-sensors utilizing d 33 mode can be several times or even tens times higher than those utilizing conventional d 31 mode. The high sensitivity together with the ease of fabrication makes micro-sensors using d 33 mode more competitive and attractive.

Original languageEnglish (US)
Title of host publicationIntegrated Ferroelectrics
Number of pages9
StatePublished - Nov 1 2006
Externally publishedYes


  • d working mode
  • Finite element analysis
  • In-plane polarization
  • Integrated ferroelectric micro-sensors
  • Interdigital electrodes
  • Lead Zirconate Titanate (PZT)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics


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