TY - GEN
T1 - Design and microfabrication of frequency selective uncooled microbolometer focal plane array for terahertz imaging
AU - Oulachgar, H.
AU - Mauskopf, P.
AU - Bolduc, M.
AU - Ilias, S.
AU - Paultre, J. E.
AU - D'Amato, D.
AU - Terroux, M.
AU - Pope, T.
AU - Alain, C.
AU - Topart, P.
AU - Jerominek, H.
PY - 2013/12/1
Y1 - 2013/12/1
N2 - A THz frequency selective microbolometer focal plane array (FPA) with 35 μm pixel pitch and a resolution of 384×288 pixels was recently developed at INO. The FPA was fabricated on a CMOS readout circuit using MEMS surface micromachining techniques. The uncooled microbolometer detectors, based on vanadium oxide technology, were optimized for detection at 4.25 THz. A high performance frequency selective THz camera operating at 4.25 THz was also demonstrated.
AB - A THz frequency selective microbolometer focal plane array (FPA) with 35 μm pixel pitch and a resolution of 384×288 pixels was recently developed at INO. The FPA was fabricated on a CMOS readout circuit using MEMS surface micromachining techniques. The uncooled microbolometer detectors, based on vanadium oxide technology, were optimized for detection at 4.25 THz. A high performance frequency selective THz camera operating at 4.25 THz was also demonstrated.
UR - http://www.scopus.com/inward/record.url?scp=84893422197&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84893422197&partnerID=8YFLogxK
U2 - 10.1109/IRMMW-THz.2013.6665501
DO - 10.1109/IRMMW-THz.2013.6665501
M3 - Conference contribution
AN - SCOPUS:84893422197
SN - 9781467347174
T3 - International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
BT - 2013 38th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2013
T2 - 2013 38th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2013
Y2 - 1 September 2013 through 6 September 2013
ER -