CVD modification and vapor/gas separation properties of nanoporous alumina membranes

M. Pan, C. Cooper, Y. S. Lin, G. Y. Meng

Research output: Contribution to journalArticlepeer-review

25 Scopus citations


A sol-gel derived 4nm pore γ-Al2O3 layer, supported on a macroporous α-Al2O3 support, was modified by chemical vapor deposition (CVD), with alternative introduction of trimethylaluminum and water vapor into the reaction chamber. Aluminum oxide was deposited in the pores of the γ-Al2O3 membrane layer. The modification resulted in a substantial reduction in the permeance of non-condensable gases, but not of condensable vapor. Separation of the mixture of condensable vapor (water) and non-condensable gas (oxygen) was performed on the unmodified and modified membranes at room temperature. The CVD modified membrane exhibits a water/oxygen separation factor as high as 71 at 12% relative humidity with water vapor permeance of 6.9x10-7mol/m2sPa. In comparison, the maximum separation factor for the unmodified membranes was about 11 at 80% relative humidity with a water vapor permeance of 2.9x10-7mol/m2sPa. Copyright (C) 1999 Elsevier Science B.V.

Original languageEnglish (US)
Pages (from-to)235-241
Number of pages7
JournalJournal of Membrane Science
Issue number1-2
StatePublished - Jun 1 1999
Externally publishedYes


  • CVD
  • Composite membranes
  • Gas separations
  • Microporous and porous membranes
  • Vapor separations

ASJC Scopus subject areas

  • Biochemistry
  • General Materials Science
  • Physical and Theoretical Chemistry
  • Filtration and Separation


Dive into the research topics of 'CVD modification and vapor/gas separation properties of nanoporous alumina membranes'. Together they form a unique fingerprint.

Cite this