Crystal structure and composition of BAlN thin films: Effect of boron concentration in the gas flow

  • Shuo Wang
  • , Xiaohang Li
  • , Alec M. Fischer
  • , Theeradetch Detchprohm
  • , Russell D. Dupuis
  • , Fernando Ponce

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

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Keyphrases

Material Science

Engineering

Physics

Chemical Engineering