Composition control and hydrogen permeation characteristics of sputter deposited palladium-silver membranes

B. McCool; G. Xomeritakis; Y. S. Lin

doi:10.1016/S0376-7388(99)00087-3

Composition control and hydrogen permeation characteristics of sputter deposited palladium-silver membranes

B. McCool, G. Xomeritakis, Y. S. Lin

Research output: Contribution to journal › Article › peer-review

96 Scopus citations

Abstract

Submicron thick continuous palladium-silver films were deposited by sputtering on mesoporous γ-alumina substrates from a target composed of 75% Pd and 25% Ag. These membranes were tested in a multigas permeation system for hydrogen permeance and hydrogen selectivity over helium. Hydrogen permeance for the membrane used in the study was found to be in the range of 3x10^-8 to 1x10^-7mol/m²sPa and H₂/He selectivities were in the range of 4-4000, depending mainly on Ag concentration and microstructure of the Pd-Ag films. A simple model based on the material balance concept has been developed to describe the transient composition behavior of the multicomponent sputter deposition process. The model is compared with experimental data over a range of deposition powers and target equilibration times. The results of the model agree well with experimental data. Both theoretical and experimental data show that deposition power and target equilibration are the most important variables affecting membrane composition. Copyright (C) 1999 Elsevier Science B.V.

Original language	English (US)
Pages (from-to)	67-76
Number of pages	10
Journal	Journal of Membrane Science
Volume	161
Issue number	1-2
DOIs	https://doi.org/10.1016/S0376-7388(99)00087-3
State	Published - Aug 1 1999
Externally published	Yes

ASJC Scopus subject areas

Biochemistry
Materials Science(all)
Physical and Theoretical Chemistry
Filtration and Separation

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10.1016/S0376-7388(99)00087-3

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title = "Composition control and hydrogen permeation characteristics of sputter deposited palladium-silver membranes",

abstract = "Submicron thick continuous palladium-silver films were deposited by sputtering on mesoporous γ-alumina substrates from a target composed of 75% Pd and 25% Ag. These membranes were tested in a multigas permeation system for hydrogen permeance and hydrogen selectivity over helium. Hydrogen permeance for the membrane used in the study was found to be in the range of 3x10-8 to 1x10-7mol/m2sPa and H2/He selectivities were in the range of 4-4000, depending mainly on Ag concentration and microstructure of the Pd-Ag films. A simple model based on the material balance concept has been developed to describe the transient composition behavior of the multicomponent sputter deposition process. The model is compared with experimental data over a range of deposition powers and target equilibration times. The results of the model agree well with experimental data. Both theoretical and experimental data show that deposition power and target equilibration are the most important variables affecting membrane composition. Copyright (C) 1999 Elsevier Science B.V.",

author = "B. McCool and G. Xomeritakis and Lin, {Y. S.}",

note = "Funding Information: This research was supported by the National Science Foundation (CTS-9216164 and CTS-9500067) and the Petroleum Research Fund administered by the American Chemical Society. Copyright: Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.",

year = "1999",

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doi = "10.1016/S0376-7388(99)00087-3",

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AU - McCool, B.

AU - Xomeritakis, G.

AU - Lin, Y. S.

N1 - Funding Information: This research was supported by the National Science Foundation (CTS-9216164 and CTS-9500067) and the Petroleum Research Fund administered by the American Chemical Society. Copyright: Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.

PY - 1999/8/1

Y1 - 1999/8/1

N2 - Submicron thick continuous palladium-silver films were deposited by sputtering on mesoporous γ-alumina substrates from a target composed of 75% Pd and 25% Ag. These membranes were tested in a multigas permeation system for hydrogen permeance and hydrogen selectivity over helium. Hydrogen permeance for the membrane used in the study was found to be in the range of 3x10-8 to 1x10-7mol/m2sPa and H2/He selectivities were in the range of 4-4000, depending mainly on Ag concentration and microstructure of the Pd-Ag films. A simple model based on the material balance concept has been developed to describe the transient composition behavior of the multicomponent sputter deposition process. The model is compared with experimental data over a range of deposition powers and target equilibration times. The results of the model agree well with experimental data. Both theoretical and experimental data show that deposition power and target equilibration are the most important variables affecting membrane composition. Copyright (C) 1999 Elsevier Science B.V.

AB - Submicron thick continuous palladium-silver films were deposited by sputtering on mesoporous γ-alumina substrates from a target composed of 75% Pd and 25% Ag. These membranes were tested in a multigas permeation system for hydrogen permeance and hydrogen selectivity over helium. Hydrogen permeance for the membrane used in the study was found to be in the range of 3x10-8 to 1x10-7mol/m2sPa and H2/He selectivities were in the range of 4-4000, depending mainly on Ag concentration and microstructure of the Pd-Ag films. A simple model based on the material balance concept has been developed to describe the transient composition behavior of the multicomponent sputter deposition process. The model is compared with experimental data over a range of deposition powers and target equilibration times. The results of the model agree well with experimental data. Both theoretical and experimental data show that deposition power and target equilibration are the most important variables affecting membrane composition. Copyright (C) 1999 Elsevier Science B.V.

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Composition control and hydrogen permeation characteristics of sputter deposited palladium-silver membranes

Abstract

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