Chemical vapor deposition of highly conductive boron-doped graphite from triphenyl boron

John Kouvetakis; M. W. McElfresh; D. B. Beach

doi:10.1016/0008-6223(94)90221-6

Chemical vapor deposition of highly conductive boron-doped graphite from triphenyl boron

John Kouvetakis, M. W. McElfresh, D. B. Beach

Molecular Sciences, School of (SMS)

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

Thermal decomposition of triphenyl boron vapor at 800°C produced boron-carbon thin films of composition C_16-18B. The room-temperature resistivity of this material was 1.8 × 10^-4 Ω· cm, considerably lower than pyrolytic carbons produced at similar temperatures. This resistivity remained unchanged as the temperature was lowered to 5 K, indicating fine-grain, metallic-like conductivity. Material composition was determined using Auger electron spectroscopy. X-ray and electron diffraction studies show that the films had a layered structure similar to turbostatic graphite and ESCA experiments indicate that the boron is bonded to carbon and is not present as a second phase.

Original language	English (US)
Pages (from-to)	1129-1132
Number of pages	4
Journal	Carbon
Volume	32
Issue number	6
DOIs	https://doi.org/10.1016/0008-6223(94)90221-6
State	Published - 1994

Keywords

CVD
Graphite
boron-doped graphite
triphenyl boron

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)

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10.1016/0008-6223(94)90221-6

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title = "Chemical vapor deposition of highly conductive boron-doped graphite from triphenyl boron",

abstract = "Thermal decomposition of triphenyl boron vapor at 800°C produced boron-carbon thin films of composition C16-18B. The room-temperature resistivity of this material was 1.8 × 10-4 Ω· cm, considerably lower than pyrolytic carbons produced at similar temperatures. This resistivity remained unchanged as the temperature was lowered to 5 K, indicating fine-grain, metallic-like conductivity. Material composition was determined using Auger electron spectroscopy. X-ray and electron diffraction studies show that the films had a layered structure similar to turbostatic graphite and ESCA experiments indicate that the boron is bonded to carbon and is not present as a second phase.",

keywords = "CVD, Graphite, boron-doped graphite, triphenyl boron",

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TY - JOUR

T1 - Chemical vapor deposition of highly conductive boron-doped graphite from triphenyl boron

AU - Kouvetakis, John

AU - McElfresh, M. W.

AU - Beach, D. B.

PY - 1994

Y1 - 1994

N2 - Thermal decomposition of triphenyl boron vapor at 800°C produced boron-carbon thin films of composition C16-18B. The room-temperature resistivity of this material was 1.8 × 10-4 Ω· cm, considerably lower than pyrolytic carbons produced at similar temperatures. This resistivity remained unchanged as the temperature was lowered to 5 K, indicating fine-grain, metallic-like conductivity. Material composition was determined using Auger electron spectroscopy. X-ray and electron diffraction studies show that the films had a layered structure similar to turbostatic graphite and ESCA experiments indicate that the boron is bonded to carbon and is not present as a second phase.

AB - Thermal decomposition of triphenyl boron vapor at 800°C produced boron-carbon thin films of composition C16-18B. The room-temperature resistivity of this material was 1.8 × 10-4 Ω· cm, considerably lower than pyrolytic carbons produced at similar temperatures. This resistivity remained unchanged as the temperature was lowered to 5 K, indicating fine-grain, metallic-like conductivity. Material composition was determined using Auger electron spectroscopy. X-ray and electron diffraction studies show that the films had a layered structure similar to turbostatic graphite and ESCA experiments indicate that the boron is bonded to carbon and is not present as a second phase.

KW - CVD

KW - Graphite

KW - boron-doped graphite

KW - triphenyl boron

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Chemical vapor deposition of highly conductive boron-doped graphite from triphenyl boron

Abstract

Keywords

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