Characterization of Si-implanted and electron-beam-annealed silicon-on-sapphire using high-resolution electron microscopy

David J. Smith, L. A. Freeman, R. A. McMahon, H. Ahmed, M. G. Pitt, T. B. Peters

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Fingerprint

Dive into the research topics of 'Characterization of Si-implanted and electron-beam-annealed silicon-on-sapphire using high-resolution electron microscopy'. Together they form a unique fingerprint.

Physics & Astronomy