Boron doping of diamond thin films

J. Mort; D. Kuhman; M. Machonkin; M. Morgan; F. Jansen; K. Okumura; Y. M. LeGrice; R. J. Nemanich

doi:10.1063/1.101676

Boron doping of diamond thin films

J. Mort, D. Kuhman, M. Machonkin, M. Morgan, F. Jansen, K. Okumura, Y. M. LeGrice, R. J. Nemanich

Research output: Contribution to journal › Article › peer-review

86 Scopus citations

Abstract

The electrical conductivity of diamond thin films produced by the hot-filament technique is found to increase when diborane is incorporated in the precursor gas mixture. The combination of well-defined bulk conductivity measurements with quantitative secondary-ion mass spectrometry and Raman spectroscopy shows that the conductivity increase is associated with atomic boron doping and rules out any significant role for a graphitic-type component.

Original language	English (US)
Pages (from-to)	1121-1123
Number of pages	3
Journal	Applied Physics Letters
Volume	55
Issue number	11
DOIs	https://doi.org/10.1063/1.101676
State	Published - Dec 1 1989
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.101676

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AU - Mort, J.

AU - Kuhman, D.

AU - Machonkin, M.

AU - Morgan, M.

AU - Jansen, F.

AU - Okumura, K.

AU - LeGrice, Y. M.

AU - Nemanich, R. J.

PY - 1989/12/1

Y1 - 1989/12/1

N2 - The electrical conductivity of diamond thin films produced by the hot-filament technique is found to increase when diborane is incorporated in the precursor gas mixture. The combination of well-defined bulk conductivity measurements with quantitative secondary-ion mass spectrometry and Raman spectroscopy shows that the conductivity increase is associated with atomic boron doping and rules out any significant role for a graphitic-type component.

AB - The electrical conductivity of diamond thin films produced by the hot-filament technique is found to increase when diborane is incorporated in the precursor gas mixture. The combination of well-defined bulk conductivity measurements with quantitative secondary-ion mass spectrometry and Raman spectroscopy shows that the conductivity increase is associated with atomic boron doping and rules out any significant role for a graphitic-type component.

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Boron doping of diamond thin films

Abstract

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