Automatic Error Detection in Integrated Circuits Image Segmentation: A Data-Driven Approach

Zhikang Zhang, Bruno Mac Hado Trindade, Michael Green, Zifan Yu, Christopher Pawlowicz, Fengbo Ren

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Due to the complicated nanoscale structures of current integrated circuits(IC) builds and low error tolerance of IC image segmentation tasks, most existing automated IC image segmentation approaches require human experts for visual inspection to ensure correctness, which is one of the major bottlenecks in large-scale industrial applications. In this paper, we present the first data-driven automatic error detection approach that targets two types of IC segmentation errors: wire and via errors. On an IC image dataset collected from real industry, we demonstrate that, by adapting existing CNN-based approaches of image classification and image translation with additional pre-processing and post-processing techniques, we are able to achieve recall/precision of 0.92/0.93 in wire error detection and 0.96/0.90 in via error detection, respectively.

Original languageEnglish (US)
Title of host publicationICASSP 2023 - 2023 IEEE International Conference on Acoustics, Speech and Signal Processing, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728163277
DOIs
StatePublished - 2023
Event48th IEEE International Conference on Acoustics, Speech and Signal Processing, ICASSP 2023 - Rhodes Island, Greece
Duration: Jun 4 2023Jun 10 2023

Publication series

NameICASSP, IEEE International Conference on Acoustics, Speech and Signal Processing - Proceedings
Volume2023-June
ISSN (Print)1520-6149

Conference

Conference48th IEEE International Conference on Acoustics, Speech and Signal Processing, ICASSP 2023
Country/TerritoryGreece
CityRhodes Island
Period6/4/236/10/23

Keywords

  • error detection
  • image classification
  • image segmentation
  • image translation
  • reverse engineering

ASJC Scopus subject areas

  • Software
  • Signal Processing
  • Electrical and Electronic Engineering

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