Analysis of thin-film systems using nonresonant multiphoton ionization

J. B. Pallix; C. H. Becker; N. Newman

doi:10.1116/1.575633

Analysis of thin-film systems using nonresonant multiphoton ionization

J. B. Pallix, C. H. Becker, N. Newman

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

Surface analysis by laser ionization (SALI) has been used to probe thin-film chemical compositions. Ar ⁺sputtering at 5–7 keV is used for ion beam milling together with nonresonant photoionization of sputtered neutrals. Photoions are analyzed by reflection time-of-flight mass spectrometry. SALI depth profiles of UHV deposited Au on GaAs show diffusion of Ga and As in the Au film and dramatic compositional variation at the interface after annealing at 405 °C for 10 min. Mass spectra taken from different depths within a superconducting thin film of nominal composition YBa₂Cu₃O₇show a variety of impurity compounds even though critical current densities are quite high.

Original language	English (US)
Pages (from-to)	1049-1052
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	6
Issue number	3
DOIs	https://doi.org/10.1116/1.575633
State	Published - May 1988
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "Surface analysis by laser ionization (SALI) has been used to probe thin-film chemical compositions. Ar +sputtering at 5–7 keV is used for ion beam milling together with nonresonant photoionization of sputtered neutrals. Photoions are analyzed by reflection time-of-flight mass spectrometry. SALI depth profiles of UHV deposited Au on GaAs show diffusion of Ga and As in the Au film and dramatic compositional variation at the interface after annealing at 405 °C for 10 min. Mass spectra taken from different depths within a superconducting thin film of nominal composition YBa2Cu3O7show a variety of impurity compounds even though critical current densities are quite high.",

author = "Pallix, {J. B.} and Becker, {C. H.} and N. Newman",

year = "1988",

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AU - Pallix, J. B.

AU - Becker, C. H.

AU - Newman, N.

PY - 1988/5

Y1 - 1988/5

N2 - Surface analysis by laser ionization (SALI) has been used to probe thin-film chemical compositions. Ar +sputtering at 5–7 keV is used for ion beam milling together with nonresonant photoionization of sputtered neutrals. Photoions are analyzed by reflection time-of-flight mass spectrometry. SALI depth profiles of UHV deposited Au on GaAs show diffusion of Ga and As in the Au film and dramatic compositional variation at the interface after annealing at 405 °C for 10 min. Mass spectra taken from different depths within a superconducting thin film of nominal composition YBa2Cu3O7show a variety of impurity compounds even though critical current densities are quite high.

AB - Surface analysis by laser ionization (SALI) has been used to probe thin-film chemical compositions. Ar +sputtering at 5–7 keV is used for ion beam milling together with nonresonant photoionization of sputtered neutrals. Photoions are analyzed by reflection time-of-flight mass spectrometry. SALI depth profiles of UHV deposited Au on GaAs show diffusion of Ga and As in the Au film and dramatic compositional variation at the interface after annealing at 405 °C for 10 min. Mass spectra taken from different depths within a superconducting thin film of nominal composition YBa2Cu3O7show a variety of impurity compounds even though critical current densities are quite high.

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Analysis of thin-film systems using nonresonant multiphoton ionization

Abstract

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