TY - JOUR
T1 - Advanced control design considerations for the Czochralski process
AU - Gevelber, Michael A.
AU - Wargo, Michael J.
AU - Stephanopoulos, George
N1 - Funding Information:
We wish to express out appreciation to DARPA and the US Air Force for their financial support of this work and to A.F. Witt, A.V. Tangborn, A. Patera, A.G. Ostrogorsky, S. Motakef, R.A. Brown, and J.J. Derby for discussions related to this work.
Copyright:
Copyright 2014 Elsevier B.V., All rights reserved.
PY - 1987/11/1
Y1 - 1987/11/1
N2 - A new control system design is proposed for the Czochralski process. A set of control objectives is proposed to meet the materials objectives and limitations posed by the coupling of the process (i.e., heater, melt, meniscus, interface, crystal and environment). Attention is given to the requirements for gallium arsenide growth including thermal stress in the growing crystal. Analysis of the process dynamics indicates the disturbances and dynamic features that must be considered in the controller design.
AB - A new control system design is proposed for the Czochralski process. A set of control objectives is proposed to meet the materials objectives and limitations posed by the coupling of the process (i.e., heater, melt, meniscus, interface, crystal and environment). Attention is given to the requirements for gallium arsenide growth including thermal stress in the growing crystal. Analysis of the process dynamics indicates the disturbances and dynamic features that must be considered in the controller design.
UR - http://www.scopus.com/inward/record.url?scp=0023453067&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0023453067&partnerID=8YFLogxK
U2 - 10.1016/0022-0248(87)90232-6
DO - 10.1016/0022-0248(87)90232-6
M3 - Article
AN - SCOPUS:0023453067
SN - 0022-0248
VL - 85
SP - 256
EP - 263
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 1-2
ER -