A thermopneumatic dispensing micropump

Keyphrases

• Micropump 100%
• Thermopneumatic 100%
• Loop Design 66%
• Closed-loop Design 66%
• Microliter 66%
• Outlet Flow 66%
• Flow Restrictor 66%
• Liquid Volume 33%
• On-a-chip 33%
• Chemical Analysis 33%
• Pressure Level 33%
• Average Power 33%
• Flow Control 33%
• Vapor-liquid-solid 33%
• MEMS Fabrication 33%
• Moving Parts 33%
• Steady-state Flow 33%
• Transient State 33%
• Design Loop 33%
• Perfluorocarbon 33%
• Liquid Reservoir 33%
• Pressure Feedback 33%
• Liquid Pressure 33%
• Silica Capillary 33%
• Pump Geometry 33%
• Thin-film Heaters 33%

Engineering

• Micropump 100%
• Open Loop 66%
• Closed Loop 66%
• Flow Restrictor 66%
• Thin Films 33%
• Flow Rate 33%
• Transients 33%
• Liquid Volume 33%
• Potential Application 33%
• Pressure Level 33%
• Microelectromechanical System 33%
• Moving Part 33%
• Steady State Flow 33%
• Average Power 33%
• Liquid Pressure 33%
• Lab-on-a-Chip Device 33%
• Silicon Dioxide 33%
• Bioinstrumentation 33%
• Flow Velocity 33%