A novel SiC MEMS apparatus for in situ uniaxial testing of micro/nanomaterials at high temperature

Wonmo Kang, M. Taher A. Saif

Research output: Contribution to journalArticlepeer-review

28 Scopus citations


We present a novel silicon carbide MEMS stage for in situ uniaxial test of micro/nanoscale samples at high temperature. The stage, which has a cofabricated temperature sensor, is used as a heat source by Joule heating during in situ tests. We theoretically study the temperature profile of the SiC stage and sample during Joule heating. The results show that sample temperature varies within 3% across the sample length up to 700 oC and is insensitive to sample resistance. We further explore a design parameter space for the SiC stage to minimize the electrical current through the sample and hence prevent potential damages on the sample. For the experimental study, we first present microfabrication and calibration procedures for the SiC MEMS stage and a cofabricated temperature sensor. Then, we experimentally consider the temperature profile of the stage and independently fabricated single crystal silicon (SCS) microsamples by precalibrated temperature sensors. We observe substantial temperature difference between the stage and sample due to the irregular surface contact at the gripping mechanism. Finally, to verify the feasibility of the in situ thermo-mechanical testing method, we obtain stress-strain responses of the SCS microsamples at temperatures from room to 400 oC which matches with the known elastic modulus of SCS in the literature.

Original languageEnglish (US)
Article number105017
JournalJournal of Micromechanics and Microengineering
Issue number10
StatePublished - Oct 2011
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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