Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 1/1/94 → 12/31/94 |
Funding
- SRCCO Inc.: $140,000.00
PROCESS DEVELOPMENT TOOLS FOR SINGLE WAFER LPCVD REACTORS
- Raupp, Gregory (CoI)
Project: Research project
Project: Research project
| Status | Finished |
|---|---|
| Effective start/end date | 1/1/94 → 12/31/94 |